Graycor completed construction of a $26 million, 135,000-square-foot research and technology center for Cabot Microelectronics in Aurora, Ill. The new center includes a pilot plant, applications laboratory, and research and development laboratory. Additionally, the facility features a 12,000-square-foot Class 1 clean room, specified to control the concentration of airborne particles to a limit of one micron per cubic foot. A library, wellness center, training center, conference room and offices round out the center.